The FIB-SEM series from Zeiss Crossbeam combines the excellent imaging and analysis performance of field emission scanning electron microscopy (FE-SEM) with the superior processing performance of the new generation focused ion beam (FIB). Whether in scientific research or industrial laboratories, you can achieve multi-user simultaneous operation on one device. Thanks to the modular platform design concept of the Zeiss Crossbeam series, you can upgrade your instrument system at any time according to your changing needs. The Crosssbeam series will greatly enhance your application experience in processing, imaging, or implementing 3D reconstruction analysis.

With the Gemini electron optical system, you can extract real sample information from high-resolution SEM images

By using the new Ion scuttor FIB tube and innovative sample processing methods, you can maximize sample quality, reduce sample damage, and greatly accelerate the experimental process

By using the low voltage function of Ion scaffold FIB, you can prepare ultra-thin TEM samples while reducing amorphous damage to a very low level

Using the variable air pressure function of Crossbeam 340

Or use Crossbeam 550 to achieve more stringent characterization, and the large warehouse even provides you with more choices

　　EM sample preparation process

Follow the steps below to efficiently and effectively complete sample preparation with high quality

Crossbeam provides a complete solution for preparing ultra-thin, high-quality TEM samples, enabling efficient sample preparation and analysis in transmission imaging mode on TEM or STEM.

1. Automatic positioning - easy navigation of the region of interest (ROI)

You can easily find the area of interest (ROI) without any effort

Use the navigation camera in the sample exchange room to locate the sample

The integrated user interface allows you to easily locate ROI

Obtain wide field of view and distortion free images on SEM

2. Automatic sample preparation - starting from the bulk material to prepare thin slice samples

You can prepare samples in three simple steps: ASP (Automatic Sample Preparation)

The defined parameters include drift correction, surface deposition, as well as rough and fine cutting

The ion optical system of FIB tube ensures extremely high flux in the workflow

Export parameters as replicas, allowing for repeated operations to achieve batch preparation

3. Easy Transfer - Sample Cutting, Mechanized Transfer

Import the robotic arm and weld the thin film sample onto the needle tip of the robotic arm

Cut the connection between the thin sample and the sample substrate to separate them

The thin film will then be extracted and transferred to the TEM grid

4. Sample thinning - a crucial step in obtaining high-quality TEM samples

The instrument is designed to allow users to monitor sample thickness in real-time and ultimately achieve the desired target thickness

You can simultaneously determine the thickness of the thin film by collecting signals from two detectors. On the one hand, the SE detector can obtain the final thickness with high repeatability, and on the other hand, the Inlens SE detector can control the surface quality

Prepare high-quality samples and reduce amorphous damage to a negligible level