basic function
To meet the etching requirements of thin film solar cells on rigid glass substrate surfaces, four devices are used to correspond to the etching needs of different functional layers of different thin film cells.P1 uses nanosecond infrared to etch TCO, P2 uses picosecond ultraviolet or green light to etch the functional layer, P3 uses picosecond ultraviolet or green light to etch the back electrode, and P4 uses high-power nanosecond infrared for edge cleaning.
Special note: In the development of the flexible substrate pilot line Yuanlu Optoelectronics, please feel free to contact us by phone for detailed consultation!
High production capacityCan be equipped with multiple beam processing (can be equipped with a single channel), with a single machine production capacity of up to100MW;
High precision: Adopting high precisionCCD positioning, positioning accuracy ± 15um;
High ReliablityAdopting a unique structure, the equipment has high stability;
Strong adaptabilityEach device can be used both offline (with a connecting station added before and after) and online to meet the needs of different customers;
performance parameter
parameter |
P1Infrared laser etching machine |
P2Picosecond laser etching machine |
P3Picosecond laser etching machine |
P4Infrared laser etching machine |
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wavelength |
1064/532/355nm |
355/532 nm |
355/532nm |
1064nm |
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power |
30W MOPA |
15-60W |
15-60W |
100W MOPA |
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Number of processing heads |
Single head/6 heads/12 heads |
Single head/6 heads/12 heads |
Single head/6 heads/12 heads |
Single head/Double head |
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Cell size |
300*400/500*500/600*600/600*900/600*1200mm |
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Motor positioning accuracy |
±5um |
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Maximum speed of motor |
1m/s |
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Minimum etching line width |
30um |
30um |
30um |
1-20mm |
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Minimum tolerance |
±5um |
±5um |
±5um |
±100um |
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Minimum line spacing |
30um |
30um |
30um |
/ |
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Thermal effect zone |
5um |
5um |
5um |
50um |
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CCD positioning accuracy |
±10um |
±10um |
±10um |
±10um |
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Straightness |
±20μm |
±20μm |
±20μm |
±20μm |
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Dust removal rate |
≥99% |
≥99% |
≥99% |
≥99% |
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Conveyor belt speed |
20m/min (adjustable speed, may affect rhythm) |
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Height of incoming and outgoing materials |
900±20mm |