1 product description

SuperView W1 optical 3D surface profilometer can be widely used in semiconductor manufacturing and packaging process testing, 3C electronic glass screens and their precision accessories, optical processing, micro nano materials and manufacturing, automotive parts, MEMS devices and other ultra precision processing industries, as well as aerospace, defense industry, research institutes and other fields. It can measure the surface of various objects ranging from ultra smooth to rough, low reflectivity to high reflectivity, and the roughness, flatness, micro geometric contour, curvature, etc. of workpieces from nanometer to micrometer levels. It provides more than 300 2D and 3D parameters as evaluation criteria based on the four major domestic and foreign standards of ISO/ASME/EUR/GBT.

2、 Product Features

1) Capable of 3D contour reconstruction and measurement of various types of sample surface microstructures;

2) Capable of detecting surface roughness and micro contours, with roughness ranging from 0.1nm to tens of micrometers;

3) Capable of data processing functions such as leveling, shape removal, denoising, and filtering;

4) Capable of surface parameter analysis such as roughness analysis, contour analysis, structural analysis, and functional analysis;

5) Equipped with automation functions such as autofocus, automatic measurement, automatic multi area measurement, and automatic stitching measurement;

6) Equipped with fast and batch analysis functions such as one click analysis and multi file analysis;

7) Capable of exporting data reports in Word, Excel, and other formats.

3、 Application Fields

Measure and analyze surface morphology features such as flatness, roughness, waviness, surface contour, surface defects, wear, corrosion, pore gaps, step height, bending deformation, and processing of various products, components, and materials.

Application example:

semiconductor. Polishing silicon wafers, thinning silicon wafers, wafer ICs
3C Electronics Sapphire glass roughness, defects in mobile phone metal shell molds, and height differences in mobile phone ink screens
Ultra precision machining optical lens	Precision machining Engine blades
Precision machining Pyramid shaped diamond magnetic head	Standard sample block Single engraved step, multi engraved roughness

4、 Performance Features

1. High precision and high repeatability

1) The measurement system is composed of optical interference technology, precision Z-direction scanning module, and excellent 3D reconstruction algorithm to ensure high measurement accuracy;

2) The unique isolation system can effectively isolate the majority of vibrations with frequencies above 2Hz, eliminate ground vibration noise and sound wave vibration noise in the air, ensure stable use of the instrument in most production workshop environments, and achieve extremely high measurement repeatability.

2. Measurement and analysis software for integrated operation

1) Measurement and analysis are operated on the same interface without switching, and the measurement data is automatically counted, achieving the function of rapid batch measurement;

2) Visual window, convenient for users to observe the scanning process in real time;

3) Combined with the automated measurement function of custom analysis templates, it can automatically complete the measurement and analysis process of multiple areas;

4) The five functional modules of geometric analysis, roughness analysis, structural analysis, frequency analysis, and functional analysis are complete;

5) One click analysis, multi file analysis, free combination of analysis items saved as analysis templates, batch sample one click analysis, and providing data analysis and statistical chart functions;

6) Up to 300 types of 2D and 3D parameters can be measured according to standards such as ISO/ASME/EUR/GBT.

3. Precise joystick

The joystick with integrated displacement adjustment functions in X, Y, and Z directions can quickly complete pre measurement tasks such as stage translation, Z-direction focusing, and stripe finding.

4. Dual collision protection measures

　　In addition to the basic software ZSTOP setting the Z-axis displacement lower limit for collision protection, there is also a mechanical and electronic sensor designed on the Z-axis. When the lens touches the sample surface, the instrument automatically enters an emergency stop state, maximizing the protection of the instrument and reducing the risk of human operation.

5. Dual channel air flotation vibration isolation system

It can be connected to a stable gas source at the customer's site or to a standard silent air compressor, and can work stably even without an external gas source.

5、 Application case:

6、 Sample Test Report:

　　Click on the image or text in the table to view detailed report data

Please be advised that due to market development and product development needs, the relevant content in this product information may be updated or modified at any time based on actual circumstances without prior notice. We apologize for any inconvenience caused.