Product Function Introduction:

Plasma cleaning technology originated in the semiconductor industry about 30 years ago, and is mainly used to clean the surface of samples of hydrocarbons The key points of plasma cleaning are: the chemical composition of the sample itself cannot be changed; Cannot change the structural characteristics of the sample; Do not damage the surface of the sample.
SOLARUS - A brand new advanced plasma cleaning system that removes contamination from hydrocarbons on TEM and SEM sample stages or samples. Solarus is a new generation plasma system, with improved performance, easy operation, and excellent cleaning effects thanks to its innovative concepts and technologies. Compared to any other plasma cleaning system on the market, Solarus can provide effective cleaning results.

Brand Introduction:

GATAN Corporation was founded in 1964 and entered the Chinese market in the late 1970s. GATAN Company enjoys a high reputation in the world electron microscope industry for its high performance products and progressiveness technology.

As a world leading manufacturer of accessories designed and manufactured to enhance and expand the functionality of electron microscopes, its products cover the needs of all steps from sample preparation to imaging, analysis, and more. The application scope of the product includes materials science, life science, geophysics, electronics, energy science and other fields. The customer base covers research institutes, universities, various testing institutions and large industrial enterprise laboratories around the world, and has been widely recognized in the international scientific research field.

Dealer Introduction:

Oubotong Co., Ltd. is a leading micro nano technology service provider in China. It is a high-tech enterprise with a foreign investment background, headquartered in Hong Kong, and has branches and offices in Beijing, Shanghai, Liaoning, Shandong and other places. As an important strategic partner of Thermo Fisher Electron Microscopy, GATAN Scanning Electron Microscopy Sample Preparation Equipment and Auxiliary Analysis Equipment in China, the company adheres to the business philosophy of "building a domestically influential instrument sales brand" and has formed a strong alliance with Thermo Fisher and GATAN brands to provide high-quality products and international technical services to tens of thousands of Chinese users.

Main technical features of the product:

Solarus is a unique cleaning solution that utilizes a plasma formula to provide faster and more thorough cleaning for all samples, including Holey carbon films. This device is capable of safely cleaning off surface deposited pollutants - extending the observation time for samples that have already been contaminated. The vacuum system using a molecular pump combined with a multi-stage diaphragm pump can ensure fast and reliable pumping effect. Less than 1 minute for air extraction and release, 30 seconds to 2 minutes for cleaning, the entire process takes less than 2 minutes.

The benefits of using plasma cleaning:

Enhance imaging capability

Improve the accuracy of elemental analysis

Extend the observation and acquisition time of EDX and EBSD in SEM

Smaller beam spots can be used, which is crucial for STEM and EELS analysis in TEM/STEM.

Main technical parameters of the product:

RF source: 50 watt RF power supply with automatic power matching function

Vacuum system: 70 liters/second molecular pump paired with two-stage diaphragm pump

Pressure: 5E-6 Torr basic pressure, 400mTorr working pressure

Vacuum gauge: Compact Pirani gauge

Cabin:

Two front-end interfaces are capable of loading TEM adapters, which are used to load side inserted TEM sample rods and SEM sample rods

The top entrance is used to place SEM sample tables, microscope barrel components, or various vacuum parts

The cabin size is 3.5 "diameter x 2.0" depth

The front observation window can observe the plasma luminescence during operation

The built-in solenoid valve isolates the compartment from the vacuum pump, with a vacuuming time of less than 1 minute and a deflation time of less than 5 seconds.

Gas control: using precise mass flow meters to measure and control gas flow rate

Gas type: Three independent gases (H2, O2, and Ar) are used

Cleaning formula: Provides a series of formulas including H2/O2 formula, and supports user-defined formulas

User interface: adopting interactive touch screen, providing interfaces in multiple languages including Chinese, English, etc

Power supply: Universal voltage/frequency 100VAC -240VAC/50-60Hz/1000W

Compared to traditional plasma cleaning equipment, Solarus has the following main advantages:

1.) Unique H2/O2 formula

2. Faster cleaning cycle (less than 2 minutes)

3. Interactive touch screen design

4.) Provide 7 tested one click operation formulas

5.) Two front loading ports for loading side inserted TEM and SEM sample rods

6. The top loading port can accommodate multiple (>25) TEM microgrids or SEM sample stages/samples

7. Automatic power matching RF source ensures long-term stability of plasma source

8.) Accurate gas flow control (mass flowmeter)

9.) Cleaning of Holey carbon film for minor damage

10.) Supports multiple languages (English, Chinese, Japanese, Korean, French, German)

Main applications of the product:

Remove contamination of TEM and SEM sample stages or samples by hydrocarbons