• High precision ± 1.0% set point
  The linearity of the mass flow controller is compensated by a polynomial approximation curve, and high accuracy is achieved within the flow control range. To improve the accuracy of actual gases, calibration data for different process gases are measured by HORIBA STEC's standard gas measurement system.
• high speed response
  Assemble a "variable PID system" that can achieve a 1-second response between any two set points. Variable PID continuously changes based on flow point settings. Optimize PID coefficients when there are changes in full-scale flow rate and gas.
• Multi gas/multi range solution
  The configuration software can quickly and conveniently change specifications. An important feature is that changes can be made without removing the mass flow controller from the gas control panel or pipeline. Reduced the number of backup quality flow controllers required, saving time and costs.

The SEC-Z500X mass flow controller is suitable for various applications and semiconductor manufacturing.