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Product details
Customization of sample transfer system is available
Quick and convenient operation: put into the sample storage box, automatically process, and take out the storage box.
Soft substrates can also be transported.
The transmission speed can be adjusted between Hi Low.
● Remote operation (optional items) can be carried out through the network.
Specifications
Quick and convenient operation: put into the sample storage box, automatically process, and take out the storage box.
Soft substrates can also be transported.
The transmission speed can be adjusted between Hi Low.
● Remote operation (optional items) can be carried out through the network.
Specifications
|
model |
YSP63FA |
|
pattern |
RIE (DP mode selection) |
|
High frequency transmission power |
600W |
|
Reaction table size |
W385×D362mm |
|
Internal cavity size |
W395 × D378 × H45mm (internal dimensions) |
|
Reactive gas |
2 intake system (oxygen, argon) |
|
Reaction gas flow control |
Mass flow controller |
|
Vacuum pump |
Rotary vacuum pump (approximately 500L/min) |
|
Gas inlet |
2 reaction gases, 1 filling gas, and 1 air |
|
External dimensions |
W1860×D1100×H1800mm |
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