Park NX20 300mm is an innovative large sample atomic force microscope in the industry, supporting full range motorization of 300mm × 300mm. The newly upgraded Park NX20 system is designed specifically for failure analysis and quality control laboratories, and can effectively detect the entire 300mm wafer without any tedious sample displacement. Despite expanding the mobile XY workbench to support 300mm samples, Park's innovative vibration isolation technology is still able to keep system noise below 0.5 (Å) RMS, typically at a level of 0.3 Å RMS.

Can be used for High end automated nano measurement tool for measuring and analyzing 300mm chip circles

·Support200mmx200mmperhaps300mmx300mmThe fully automatic atomic force microscope

·Precise measurement of each point on the sample can be achieved without manually moving the sample

·Park NX20300 mmDesigned specifically for failure analysis and quality control

·Unique industrial testing software enables fully automated batch measurement of samples, enablingNX20The detection process has become efficient and user-friendly

Built specifically for large sample wafer testing

The NX20 300 mm has been redesigned to achieve high-precision measurement of large samples. The entire 300mm wafer area can be measured and analyzed using low-noise atomic force microscopy. This opens up a whole new range of automated measurements, allowing engineers to carry out their work more quickly, conveniently, and accurately.

flexible300mm sample suction cup

The Park NX20 300mm vacuum suction cup supports wafers of various sizes, shapes, and types, allowing users to scan almost any sample accurately.

300mm XY axis worktable

motorizedThe 300mm XY axis worktable allows users to move the measurement position of the atomic force microscope within the entire 300mm area.

Optimize for wide applicability

The NX20 300mm provides automatic format atomic force microscopy measurements for numerous applications, providing precise measurement and analysis for nanoscale samples. With the ability to measure roughness, height, and depth, inspect defects, analyze electrical and magnetic faults, characterize thermal properties, and image nanomechanical properties, this atomic force microscope is an ideal choice for FA, QA, and QC engineers to perform various tasks on large samples.