XY scanner:

• Closed loop control single module flexible XY scanner.
• Scanning range: 50 μ m × 50 μ m (optional 100 μ m × 100 μ m)
• resolving power: 0.05 nm
• Localization detection noise:< 0.3 nm (bandwidth: 1 kHz)
• Horizontal linearity:<2nm (over 40 μ m scan)

Z scanner:

• Flexible guided high-intensity scanner
• Scanning range: 15 μ m (optional 30 μ m)
• Resolution: 0.015 nm
• Localization detection noise: 0.03 nm (bandwidth: 1 kHz)
• Resonance frequency:> 9 kHz (typically 10.5 kHz)
• Surface imaging noise:< 0.03 nm (0.02 nm typical)

Optical system:

• Direct view coaxial optical system for observable samples and probes
• Field of view: 480 × 360 μm (10× objective lens)
• CCD: 1M pixels (pixel resolution: 0.4 μm）

objective lense:

• 10x (0.21 NA) ultra long working range lens (1 μ m resolution)
• 20x (0.42 NA) high-resolution long working range lens (0.6 μ m resolution)

Signal processing:

• ADC: 18 channels
• 4 high-speed ADC channels (50 MSPS)
• X. 24 bit ADCs for positioning sensors of Y and Z scanners
• DAC: 12 channels
• 2 high-speed DAC channels (50 MSPS)
• X. 20 bit DACs located by Y and Z scanners
• Big data size: 4096 x 4096 pixels

Integrated functions:

• 3-channel digital lock-in amplifier
• Calibration of elasticity coefficient using thermal noise method
• Digital Q control

External signal intervention:

• 20 embedded signal input/output ports
• 5 TTL outputs: EOF, EOL, EOP, Modulation, and AC bias

atomic force microscope atomic force microscope