The new Pura Plus is specially designed by Micellar Instruments to meet the latest requirements for equipment size and specifications in the wafer industry. Pura Plus is an online micro humidity anomaly transmitter, installed in multiple channels at the end of the gas supply leading to the production line in semiconductor factories, used to monitor the application of ultra pure inert gases. The gas system distribution in the factory is complex, involving many branches, nodes, and usage points. Therefore, at conventional humidity monitoring points, moisture may seep in due to trace leaks, inefficient system design, component failures, or process errors, affecting downstream use. The Pura Plus installed in the distribution system can provide fast response indication at a moisture level of 20 ppb The response time for a 1 ppb anomaly is less than 1 minute. highlight Rapid response to ppb level humidity fluctuations Sensitivity at low humidity ppb level (<1 ppb) A new concept of multi-point measurement installation Low maintenance requirements Signal light type status indication Warning and alarm points can be set Modbus network compatibility Multi channel software for remote control interface Pipeline detection of ultra pure gas (UHP)
technical indicators
response speed Response time for 1 ppb moisture fluctuation within 1 minute at 20 ppb humidity Humidity range 1 ppb to 20,000 ppm pressure range 0 to 10 bar Voltage resistance level 300 bar leak test 0-9 mbar l/s Scope of work flow 1 ~ 10 l/min Operating Temperature 5 ~ 40°C Storage temperature 30 ~ 70°C power supply 20 ~ 28 V DC power consumption 5 W maximum External fuse rating 500 mA fast melting type data output Modbus ASCII two-wire RS485 Warning and alarm output 2 routes Maximum Voltage 40 V DC Maximum current 100 mA Materials in contact with gases Shell material Stainless steel AISI 316L, inner surface electropolished<10 Ra Sensor structure Aluminum oxide electrolyte, upper layer gold-plated protection, lower layer aluminum layer Internal volume 4.4cm³ weight 450g Gas interface 1/4' m VCR electrical interface 9-pin D-type m interface Electromagnetic Compatibility EN50081-2 and EN50082-2