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Product details
Liquid particle size analyzer
Can detect particles of 0.15um in photoresist products, SOG and other products
◼ Can detect particles with a minimum particle size of 0.15um
◼ The customizable particle size range is 0.15~0.5um, which can be expanded to 10 channels through the controller of KE-40B1
The factory setting is 4-channel: 0.15/0.2/0.3/0.5um
◼ Integrated leakage sensor and alarm output
◼ Customers can choose their own particle size channel within this measurement range (via KE-40B1)

The factory setting is 4-channel: 0.15/0.2/0.3/0.5um
◼ Integrated leakage sensor and alarm output
◼ Customers can choose their own particle size channel within this measurement range (via KE-40B1)

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