KRI Hall ion source eH 1000 from the United States
The KRI Hall ion source eH 1000, established by Dr. Kaufman from the United States and represented by Shanghai Bodong, is an efficient gas utilization
Product details
Product Features of KRI Hall Ion Source eH 1000 in the United States:
BodongKRIHall ion sourceeH 1000characteristic:
1.Detachable anode component-Easy to maintain;During maintenance,Minimize downtime to the greatest extent possible;Plug and play spare anode
2.Wide beam high discharge current-High;Uniform etching rate;High etching efficiency;High ion assisted coatingIADefficiency
3.multipurpose-apply toLoad lock /Ultra high vacuum system;Easy installation;No need for water cooling
4.Efficient plasma conversion and stable power control
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