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Zhongshan Anyuan Instrument Co., Ltd
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Hitachi FT9500 X-ray Fluorescence Coating Thickness
A product lineup utilizing newly developed multi capillary tubes for X-ray focusing has been born
Product details

A product lineup using newly developed multi capillary tubes for X-ray focusing has been born. In addition, with the X-ray detection structure as the center, various components are optimized to significantly improve detection sensitivity and achieve high processing capability without sacrificing detection accuracy. Moreover, the equipment has been redesigned to make the use of the sample chamber and the inspection of detection points easier.

1. High precision detection in the field of microscopy

By adopting newly developed multi capillary tubes and optimizing the detector, the processing capability has been further increased by more than twice on the basis of achieving an irradiation radius equivalent to the old model FT9500X of 30 μ m (assuming FWHM: 17 μ m).

2. The product lineup is suitable for various types of testing samples

For different types of test samples, you can choose from the following three models.


· Measurement of micro components and ultra-thin film models for various electronic components such as lead frames and connectors

· Capable of handling dimensions of600 mm × 600 mm Large Printed Circuit Board Model for Large Printed Circuit Boards

· Suitable for measuring the electrode parts of ceramic chips that were previously difficult to measure simultaneouslyModel of Sn/Ni two-layer high-energy measurement

3. Balancing ease of operation and safety

The opening has been enlarged, and the door of the sample chamber can also be easily opened and closed with one hand. This improves the ease of removing and placing test samples, and the sealing structure greatly reduces the risk of X-ray leakage, allowing users to use it with confidence.

4. Visible detection location

By setting up a large observation window and modifying the layout of components, the sample chamber door can be easily observed at the testing site even when it is closed.

5. Clear sample images

A sample observation camera with higher resolution than before was used, and full digital zoom was adopted to eliminate positional deviation, allowing for clear observation of small samples as small as tens of micrometers.
In addition, LED is also used as the sample observation light, without the need to replace the bulb like in previous models.

6. New GUI


Various detection methods and samples have been registered in the form of application icons. The icons are all photos of the test samples, illustrations of multi-layer films, etc., making registration and organization very convenient, so that users can directly conduct testing without taking detours.

Use the detection wizard window to guide the operation. By linking with the detection screen, gradually guide the user to perform the current required work.

从左边开始、启动画面 ・易于操作的开口部 ・大开口的样本室门・高灵敏度(Au光谱图示)

model FT150 (Standard Type) FT150h (high-energy type) FT150L (corresponding to large circuit boards)
Measurement elements Atomic numbers 13 (Al) to 92 (U)
x-ray source Tube voltage: 45 kV
Mo target W target Mo target
detector Si semiconductor detector (SDD) (no liquid nitrogen required)
X-ray spotlight Focusing duct method
Sample observation CCD camera (1 million pixels)
focus Laser focusing, automatic focusing
Maximum sample size 400(W) × 300(D) × 100(H) mm 400(W) × 300(D) × 100(H) mm 600(W) × 600(D) × 20(H) mm
table stroke 400(W) × 300(D) mm 400(W) × 300(D) mm 300(W) × 300(D) mm
operating system Computer, 22 inch LCD display screen
measurement software Thin film FP method (up to 5 layers of film, 10 elements), detection line method, qualitative analysis
data processing Installation of Microsoft Excel and Microsoft Word
safety function Sample door interlock
power consumption Below 300 VA

Optional items


Spectral matching software (material identification)

bulkFP (Measurement of Metal Composition Ratio)

Sample operation restriction settings

Wafer fixture(FT150/FT150h)

touchpad

traffic light

printer

Emergency stop switch box

    High performance X-ray fluorescence coating thickness measuring instrument FT150 series

FT150 utilizes a high-intensity X-ray beam with a diameter of 30 µ m generated by multiple capillaries, which is most suitable for high-precision analysis and evaluation of small components such as wire racks, miniature connectors, flexible circuit boards, and ultra-thin coatings.

高性能X射线荧光镀层厚度测量仪 FT150系列

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