one.Function Description：
The standard testing method for four point probes uses a stepper system to automatically control the contact between the probe and the sample, reducing the influence of human factors on the test results; Refer to A S. T.M standard; Measurement of block resistance, resistivity, conductivity data, PC software acquisition and data processing to achieve automatic point measurement mode or manual point measurement mode, repeated testing at the same location or multi-point surface resistance measurement, report outputData statistical analysis; Provide standard calibration resistors.
FT-3120 series semi-automatic four probe tester
two.Scope of application:
WaferAmorphous silicon/Measurement of resistivity of microcrystalline silicon and conductive film; Selective emitter diffusion sheet; Surface passivation film; Cross finger PN junction diffusion sheet* Electrode design, such as electroplating copper resistance measurement, etc;Semiconductor material analysis, ferroelectric materials, nanomaterials, solar cells,LCD，OLED， Touch screen, etc
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FT-3120 series semi-automatic four probe tester
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threeTechnical parameters:
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Specification and model
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FT-3120A
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FT-3120B
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FT-3120C
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FT-3120D
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1. Resistance
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10^-3～2×10^4Ω
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10^-5～2×10^5Ω
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10^-6～2×10^5Ω
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10-4～1×107Ω
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2. Block resistor
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10^-3～2×10^4Ω/□
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10^-5～2×10^5Ω/□
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10^-6～2×10^5Ω/□
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10-4～1×107Ω/□
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3. Electrical resistivity
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10^-4～2×10^5Ω-cm
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10^-6～2×10^6Ω-cm
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10-7～2×106Ω-cm
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10-5～2×108Ω-cm
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4. Test current
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0.1μA. μA.0μA，100µA，1mA，
10mA，100mA
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1A, 100mA, 10mA, 1mA, 100uA, 10uA, 1uA, 0.1uA
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10mA ---200pA
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5. Current accuracy
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±0.1%
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±2%
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6. Resistance accuracy
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≤0.3%
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≤10%
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7. PC software operation
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PC software interface: resistance, resistivity, conductivity, square resistance, temperature, unit conversion, current, voltage, probe shape, probe spacing, thicknessData management analysis: process data, large and small values, mean, variance, coefficient of variation, sample number, test point statisticsReport generationetc.
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8.probeRange:
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Probe pressure is 100-550g; Manually adjust according to sample contact requirements
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9. Exploreneedle
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Inter needle insulation resistance: ≥ 1000MΩ； Mechanical drift rate: ≤ 0.3%
Round headcoppergold-platedtexture of material,Probe spacing1mm； 2mm； 3mm optional,Other specifications can be customized
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10.Measurable chip
sizechoose
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Wafer size: 2-12 inches（6 inches150mm，12 inches300mm）；
Square piece: up to 156mm X 156mm or 125mm X 125mm
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11. Analysis mode
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Automatic or manualSingle pointpattern
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12Pressure method
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Measurement repeatability: repeatability ≤3%
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13. Safety protection
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Equipped with limit range and pressure protection; Misoperation and emergency stop protection; Abnormal alarm
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14.testing environment
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Laboratory environment
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15Power supply
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Input: AC 220V±10%.50Hz power consumption:<100W
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16. Purchase items
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Computers and printers
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