Function Description：
Four point probe method, fully automated operation measurement system, PC software acquisition and data processing; Refer to A S. The T.M standard method is used to test the resistivity and block resistance of semiconductor materials; Can set probe pressure values, test points, and multiple measurement mode options; Vacuum environment, can display: square resistance, resistivitydisplay2D, 3D scanning/numerical chart, temperature and humidity valuesProvide standard calibration resistorsReport outputData statistical analysis.
FT-3110 series fully automatic four probe tester
two.Scope of application
WaferAmorphous silicon/Measurement of resistivity of microcrystalline silicon and conductive film; Selective emitter diffusion sheet; Surface passivation film; Cross finger PN junction diffusion sheet* Electrode design, such as electroplating copper resistance measurement, etc;Semiconductor material analysis, ferroelectric materials, nanomaterials, solar cells,LCD，OLED， Touch screen, etc
threeTechnical parameters:
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Specification and model
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FT-3110A
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FT-3110B
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1. Resistance
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10^-5～2×10^5Ω
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10^-6～2×10^5Ω
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2. Block resistor
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10^-5～2×10^5Ω/□
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10^-6～2×10^5Ω/□
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3. Electrical resistivity
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10^-6～2×10^6Ω-cm
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10-7～2×106Ω-cm
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4. Test current
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0.1μA.μA.0μA，100µA，1mA，
10mA， one hundredmA
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1A、100mA、10mA、1mA、100uA、10uA、1uA、0.1uA
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5. Current accuracy
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±0.1%
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6. Resistance accuracy
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≤0.3%
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7. PC software operation
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PC software interface: resistance, resistivity, conductivity, square resistance, temperature, unit conversion, current, voltage, probe shape, probe spacing, thickness2D, 3Datlas、Pressure
Report generationetc.
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8. Pressure range:
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Adjustable range of probe pressure: software control,100-500gAdjustable
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9. Exploreneedle
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Inter needle insulation resistance: ≥ 1000MΩ； Mechanical drift rate: ≤ 0.3%
Round headcoppergold-platedtexture of material,Probe spacing1mm； 2mm； 3mm optional,Other specifications can be customized
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10.Measurable chip
sizechoose
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Wafer size: 2-12 inches（6 inches150mm，12 inches300mm）；
Square piece: up to 156mm X 156mm or 125mm X 125mm
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11. Analysis mode
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Automatic testing of single point, five point, nine point, multi-point, diameter scanning, surface scanning and other modes
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12Pressure method
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Measurement repeatability: repeatability ≤3%
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13. Safety protection
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Equipped with limit range and pressure protection; Misoperation and emergency stop protection; Abnormal alarm
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14.testing environment
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vacuum
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15Power supply
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Input: AC 220V±10%.50Hz power consumption:<100W
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16. Purchase items
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Computers and printers
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