Product Features

PRODUCT FEATURES

CLEAN OVENWidely used for heat treatment/drying or aging of semiconductor wafers, liquid crystals, optical modules, camera modules, and other parts and equipment with high baking requirements, and also suitable for installation in clean room environments. The cleanliness level of 100 is mainly achieved through the use of primary filters, HEPA high-efficiency filters, and front and rear laminar flow circulation systems, providing stable performance during heating or cooling processes.

The simple and convenient PID microprocessor temperature control range can be set from ambient temperature+15 ° C to 200 ° C. The dust-free oven uses a PT100 platinum sensor to measure the actual chamber temperature, and a 0.3 µ mHEPA high-efficiency filter to effectively circulate and filter the air. Flow meters and NPT accessories can also be optionally selected to introduce inert gas into the chamber for special process baking.

CLEAN OVENThe outer material is SPCC steel plate, which has been washed with soda water and treated with powder coating paint; The interior is made of corrosion-resistant stainless steel. Equipped with four adjustable perforated stainless steel brackets, the brackets and body are easy to disassemble and clean.

The safety features include multiple protection mechanisms such as independent over temperature protection, phase sequence protection, and power-off protection to ensure safe use. There is a safety door that can only be opened after baking and cooling to the specified temperature to ensure the safety of operators.

Product Features

●All welding and sealing structures ensure sustained low particle count;

●The inner cavity is made of stainless steel (304 type), which is corrosion-resistant;

●The inner liner is fully welded, and the pipeline is welded with seamless stainless steel fittings;

●The external paint is a white powder coating that provides long-lasting corrosion protection;

●Using fiberglass insulation to ensure a lower surface temperature of the cabinet;

●Heavy duty door double sealed insulation structure;

●Independent over temperature protection;

●Each oven is fully assembled and independently tested by the factory;

●Heat resistant HEPA air filtration and conveying system;

●All recycled air is filtered through circulation and does not use clean room air;

●When the filter needs to be replaced, it can be determined through an air pressure gauge;

●High capacity horizontal air recirculation systems and electric heating systems can achieve performance temperature.

Optional components

1. Temperature recorder (paper-based or paperless)

2. Programmable controller, Ethernet, and 485/232 communication

3. Clean room packaging for transportation and installation

4. Layer frame

5. MES communication settings

Product parameters

PRODUCT PARAMETERS

customized service

CUSTOM SERVICEShenzhen Yihexing can provide varying degrees of uniformity, size, and temperature range; If you have specific requirements or specifications, please contact us based on your needs so that we can ensure that the design, testing, and adjustment of the equipment can meet your requirements.