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Differential pressure mass flow controller D500
Differential pressure mass flow controller D500
Product details
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Pressure insensitivity performance
New high-performance pressure compensation function simplifies gas supply system -
Multi range, multi gas, and multi pressure solutions
New feature allows users to change gas type, full-scale flow rate, and supply pressure range -
G-LIFE (Gas Law Verification of Integrated Flow Limiting Equation) self diagnostic function
The advanced process health monitoring function allows operators to conduct tests on their own, and even if the throughput is increased, the test can usually be completed in three seconds or less. -
high-precision
Advanced 3D adjustment function improves the flow accuracy of process gas -
quick response
Response time:<0.8 seconds
Accurate and stable flow control can be achieved -
dynamic range
Wide control range: 0.2% full range to 100% full range
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