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DS300 Mass Flow Controller
The DS300 pressure type gas mass flow controller is a gas mass flow controller developed for the semiconductor industry, suitable for semiconductor eq
Product details
advantage
High control accuracy, with an accuracy of ± 1.0% S.P. (≥ 10% F.S.).
Fast response speed, response time ≤ 0.5sec.
Adopting flow sensor technology based on pressure principle, the product has pressure insensitive characteristics and can adapt to large fluctuations in gas source pressure.
The DS300 adopts effective mechanical processing technology and surface treatment technology to solve the problem of deep and small holes that cannot or are difficult to electro polish (EP), achieving surface electrochemical polishing treatment of stainless steel small holes, deep blind holes, and cross holes with relatively small aperture (aperture<1mm) and relatively large aspect ratio (>10), fully meeting the requirements of SEMI standards.
Technical Parameter
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DS300C |
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model |
DS300C |
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Valve type |
normally closed |
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Flow specification (N2) |
(0～30,50,100,200,300,500) SCCM |
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accuracy |
±1% S.P. (≥10% F.S.) |
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linear |
±0.5% F.S. |
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repeatability |
±0.2% F.S. |
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response time |
≤ 0.5sec |
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inlet pressure |
240-450KPa flow specification ≤ 5SLM |
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KPa |
≤ 1.2KPa Flow specification ≤ 5SLM |
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temperature coefficient |
Zero point: ≤ ±0.02% F.S./℃； |
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pressure resistance |
3 MPa |
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Leakage rate |
1×10-11Pa·m3/ sec He |
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Sealing material |
metal seal |
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Maximum working pressure |
0.45MPa |
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Ambient Temperature |
（10～45）℃ |
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Input signal |
Number: RS485 or DeviceNet |
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output signal |
Number: RS485 or DeviceNet |
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drift |
＜ 0.6% F.S./year without zero point correction |
|
power supply |
± 8 to ± 16 VDC (bipolar) or+14 to+28 VDC (unipolar) |
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surface chemical composition |
Cr/Fe ratio ≥ 2.0; |
|
Surface roughness |
Ra 5μinch |
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Standard joint form |
VCR1/4 male connector; |
|
Form of power connector |
D-type 9-pin male connector; |
|
weight |
1.2Kg |
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