◆ Optical metallographyMicroscopeIntegrated design with atomic force microscope, powerful functionality
◆ Simultaneously equipped with optical microscope and atomic force microscope imaging functions, both can work simultaneously without affecting each other
◆ Simultaneously equipped with optical two-dimensional measurement and atomic force microscope three-dimensional measurement functions
◆ The laser detection head and sample scanning table are integrated into one, with a very stable structure and strong anti-interference ability
◆ Precision probe positioning device, laser spot alignment adjustment is very simple
◆ Single axis drive sample automatically approaches the probe vertically, scanning the needle tip perpendicular to the sample
◆ Intelligent needle insertion method for motor controlled automatic detection of piezoelectric ceramics, protecting probes and samples
◆ Ultra high magnification optical positioning system, achieving precise positioning of probe and sample scanning areas
◆ Integrated scanner non-linear correction user editor, with superior nano characterization and measurement accuracy98%
technical parameter
| Working mode | Contact mode, tap mode | Optical eyepiece | 10X |
| Optional mode | Friction/lateral force, amplitude/phase, magnetic/electrostatic force | Lighting method | LED Kohler Lighting System |
| Force spectrum curve | F-Z force curve, RMS-Z curve | Optical focus | Coarse and micro manual focusing |
| XY scanning range | 50 × 50um, optional 20 × 20um, 100 × 100um | camera | 5-megapixel CMOS sensor |
| Z-scan range | 5um, optional 2.5um, 10um | display | 10.1-inch flat panel display with image measurement function |
| Scanning resolution | Horizontal 0.2nm, vertical 0.05nm | Scanning rate | 0.6Hz~30Hz |
| Sample size | Φ≤68mm,H≤20mm | Scanning angle | 0~360° |
| Sample table itinerary | 25×25mm | Operating environment | Windows XP/7/8/10 operating system |
| Optical objective lens | 5X/10X/20X/50X flat field apochromatic objective lens | communication interface | USB2.0/3.0 |
Application Cases

GaNsubstrate/Scanning range3µm×3µmMonocrystalline silicon pyramid/Scanning range30µm×30µm

Micron grating/Scanning range30µm×30µmMoTe/Scanning range16µm×16µm
Packaging List
