Features of 8-inch Olympus wafer inspection system

The 8-inch Olympus wafer inspection system has a wide range of adaptability and flexible matching, and is highly practical and reliable.

The 8-inch Olympus wafer inspection system transports silicon wafers of various sizes

Based on the size of silicon wafers, the AL120 series wafer inspection system has three basic models: single 200mm (AL120-L8), 150mm and 200mm compatible (AL120-L86), and single 150mm or smaller size (AL120-L6). Each one is designed for transporting silicon wafers that have undergone microscopic inspection. Both front and back macroscopic inspections are applicable to silicon wafers of various sizes.

The 8-inch Olympus wafer inspection system can transport ultra-thin silicon wafers, as thin as 90um

In order to cope with the more challenging ultra-thin silicon wafers, the Olympus wafer inspection system has specially designed a transfer arm that can handle 200mm wafer boxes of 25 wafers and silicon wafers as thin as 90um, and complete safe transfer and microscopic inspection. Up to 10 different thicknesses of silicon wafer information can be pre-set through the panel.

Precision capability enhances the function of macroscopic inspection

The new machine with macroscopic inspection function (LMB type) has a 360 degree automatic rotation to complete macroscopic inspection of each side of the silicon wafer. This design can easily detect defects and particles on both sides of the silicon wafer. Additionally, macroscopic inspection can be performed by tilting the silicon wafer 30 degrees using a joystick.

LCD display provides precision and ease of operation

The LCD display provides the operator with a more intuitive visual experience, making the inspection items and sequence of the Olympus wafer inspection system clear, as well as the parameters required for installation and debugging. The inspection results, including macroscopic and microscopic defect marks inputted by the operator, can be displayed on the LCD screen for easy review by the operator.

● Precise reliability

For the safety of silicon wafers, the AL120 series wafer inspection system adopts two new silicon wafer detection methods: the thickness of the silicon wafer and its position in the wafer box. Scan the position of the silicon wafer in the wafer box before transmission. The automatic locking function of the selected stage improves the safety of transferring silicon wafers to the vacuum stage.

● Powerful and reliable microscope

The Olympus Semiconductor Inspection Microscope MX61 can present high-definition and high-resolution images through different observation methods: bright field, dark field, differential interference, infrared, and deep ultraviolet. Equipped with an electric objective lens turntable, it has a linkage function with the aperture light beam of the microscope host. Every time the objective lens is switched, the aperture light beam will also automatically change.

● Compliant with SEMI S2/S8 and RoHS standards

The AL120 series wafer inspection system design not only focuses on the safety of silicon wafers during transportation, but also ensures the safety of operators, fully complying with SEMI's S2 and S8 standards, as well as meeting Rohs standards.

Technical specifications for 8-inch Olympus wafer inspection system