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Product details
Product Introduction:
Surface micro three-dimensional structure measurement, non-contact measurement of surface three-dimensional roughness
Detection object:
Precision optical components, micro nano machining devices, metal machined parts
Targeting industries:
Various research institutes and enterprises engaged in surface analysis such as semi semiconductors, automobiles, solar energy, precision optics, etc
technical parameter
Technical parameters:
1.Longitudinal measurement repeatability: 0.5nm（PSIMode) Vertical resolution:2nm
2.Longitudinal measurement range:15mm
3.Height measurement indication error:<3%
4.Equipped with ultra-high lateral resolution measurement function (lateral resolution)100nm）
5.Rich 3D feature analysis software and roughness analysis functions
6.Adopting seismic resistant hardware structure and software algorithm design
Measurement examples
VLSIThree dimensional measurement results of nano step standard block Measurement of Three Dimensional Microstructure of Grinding Processing Surface
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